Method for scanner control in at least one scan axis in a laser scanning microscope

ABSTRACT

Method for scanner control in at least one scan axis in a laser scanning microscope, the scan field being divided into partial area, a first image of at least one partial area produced by a forward scan being compared with a second image of the partial area produced by a back scan and a correction value for the scanner control determined from the deviation between the first and second image.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a nationalization of PCT/EP2004/014318 filed 16 Dec. 2004 andpublished in German.

BACKGROUND OF THE INVENTION

Methods for scanner control in a laser scanning microscope aredescribed, for example, in U.S. Pat. No. 6,037,583.

Despite calibration (for example, by a linear electrical signal) of thescanner, fraying of vertical lines as the result of phase differencesbetween the forward and back scan (bidirectional deviations) occurs,caused by:

1. Long-term changes of scanner response

2. Temperature/load-related fluctuations

3. Zoom dependence of scanner response.

This problem is to be corrected by the invention.

SUMMARY OF THE INVENTION

This task is solved by a method for scanner control in at least one scanaxis in a laser scanning microscope, in which the scan field issubdivided into partial regions, a first image of at least one partialregion generated by a forward scan being compared with a second image ofthe partial region generated by a back scan and a correction value beingdetermined for the scanner control from the deviation between the firstand second images.

In one embodiment of the invention, the step of subdividing the scanfield into partial regions comprises dividing the scan field into stripsthat form the partial regions. In this embodiment, the slice directionof the strips lies parallel to the image edge of the scan field.

In another embodiment, the longitudinal axis of the strips duringline-by-line scanning is perpendicular to the direction of the scanlines in the image.

In still another embodiment, in the determining step, the correlation ofpartial images (that is, images of the partial regions) is determinedfor each scan axis.

In still another embodiment, deviations are determined from thecorrelation of the partial areas. The deviations can be combined as datapoints for a deviation curve and this deviation curve is used todetermine a correction value of the scanner control.

The deviation curve can be correlated with the individual frequencyfractions of the scanner control (sine curves) for determination of thecorrection of the scanner control and correction values for the scannercontrol are determined via the correlation values.

The method can further comprise the step of storing correction valuesfor the scanner control together with the time the correction values aredetermined.

A comparison is carried out of correction values recorded at differenttimes.

The frequency of the scanner can be controlled or corrected with thedetermined correction values.

In the step of subdividing the scan field, the slice direction of thepartial image can lie parallel to an image edge of the scan field.

Alternatively, in the step of subdividing the scan field, the slicedirection of the partial images can agree with a scan axis, or it canhave an angle to at least one scan axis.

In the step of determining a correction value, a test pattern can beused to determine the correction value.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatic illustration of a laser scanning microscopewith a scan module and a detection module.

FIGS. 2 a and 2 b are diagrams illustrating an example of the basicprinciple of the invention.

FIG. 3 is a diagram showing the slice direction of partial images usedto determine the error of the X scanner in accordance with the presentinvention.

FIG. 4 shows the case of a rotated scan.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The underlying idea of the invention is to carry out evaluation of ascan image by investigating it for bidirectional deviations andconducting a continuous correction of the coefficients for scannercontrol during microscope operation (for example, between scans).

The invention is further explained below by means of schematicrepresentations.

FIG. 1 shows a laser scanning microscope LSM with a scan module SC and adetection module DE.

Additional details are known from U.S. Pat. No. 6,631,226.

Control of the scan module SC and detection module DE, as well asfeedback of detection of the control state occur via a control unit AS,for example, a real-time computer.

Control unit AS is connected to a PC as a user interface.

Image evaluation according to the invention and a change in control datafor the scanner can occur in the real-time computer or PC.

FIGS. 2 a and 2 b show an example of the basic principle.

Here the strip-like partial images B1, B2 for the forward and back scanare shown by means of a scanned cross grid sample with grid strips GS,in FIG. 2 a in the X scanner direction and in FIG. 2 b in the Y scannerdirection. Partial images B1, B2 are brought together and correlatedwith each other, i.e., made congruent by displacement, and thecorrection values determined.

FIG. 3 shows that the slice direction of the strip-like partial imagesB1, B2 to determine the error of the X scanner occurs perpendicular tothe X direction, i.e. in the Y direction (unrotated scan).

Since the Y scanner is at rest between scan lines, determination of theerror in the Y direction is not possible here.

A detailed evaluation of image distortions caused by line movement ofthe scanner is possible if the image is sliced into strips perpendicularto the scan lines and each strip evaluated by itself. The overall trendof the bidirectional deviations within a scan line is then obtained.Knowledge of this trend permits better correction than a simpledisplacement between forward and back lines constant over the entireimage.

Unrotated Scan Variant

This means that one of the scanners operates as a fast line scanner(hereafter referred to as X scanner) and the other scanner as a slowline scanner (hereafter referred to as Y scanner). The Y scanneradvantageously jumps during the reversal phases of the X scanner fromline to line (line advance) and is at rest during actual data recording.This rotational direction of the scan is referred to subsequently as 0°scan angle. The slice direction for the strips is parallel to the imageedge and also parallel to the Y direction for 0° scan angle.

The displacement direction to determine the error of the X scanner isparallel to the scan direction of the X scanner, i.e., the two partialimages of the even and odd scan lines (forward and back scan) aredisplaced relative to each other along the direction in the figure thatis predetermined by movement of the X scanner, i.e., parallel to thescan lines at 0° scan.

A determination of the error of the Y scanner is not possible at 0° scan(Y scanner at rest during scan lines).

FIG. 4 shows the case of a rotated scan (scan angle not equal to 0°,180°, 90° and −90°). In this case both scanners operate synchronously asline scanners. Between the scan lines both scanners advantageously jumpduring the reversal times of both scanners to the next line. Byadjusting the scan amplitudes of both scanners, the scan angle(orientation of the scan line in the sample) is adjusted. In this casethe slice direction for the strip-like partial images occurs at an angleto the scan directions X and Y. The slice direction also lies hereessentially in the edge direction of the scanned image.

To determine the error of the X scanner, a shift of the partial imagesfrom the forward and back scan occurs in the X direction (that is, inthe direction of the X scanner, not the direction of the scan lines), todetermine the Y error in the Y direction (that is, in the direction ofthe X scanner, not the direction of the scan lines).

The corresponding correction is determined in each case and thecorrection vector determined from both values.

Rotated Scan Variant, i.e., Scan Angle not Equal to 0°, 90°, −90° and180°:

The X scanner and Y scanner move quickly and both scanners jump a littlebit between lines.

When both scanners start simultaneously with the same amplitude, thelight point in the sample does not move from left to right but frombottom left to top right (for example) [[→]]—greater than 45° rotatedscan. If the Y scanner moves with only half amplitude, the light spotgoes from bottom left to the half top right [[→]]—greater than about 22°scan angle. [[ . . . ]] Between the rotated scan lines, both scannersjump a little bit (constant offset of movement superimposed) so that thenext scan line lies next to the last one.

The slice direction for the strips is also advantageously parallel tothe image edge, perpendicular to the direction of the scan lines.

The displacement direction to determine the error of the X scanner isparallel to the scan direction of the X scanner, i.e., the two partialimages of the even and odd scan lines (forward and back scan) aredisplaced relative to each other along a direction of the imagepredetermined by movement of the X scanner (the direction along whichthe light spot would move in the sample if the X scanner were movedalone).

The displacement direction to determine the error of the Y scanner isparallel to the scan direction of the Y scanner.

It can also be useful, in order to determine the time trend of the imagedistortion, to also break down the image parallel to the direction ofthe scan lines.

In a rotated scan the scanner is scanned not along the scan lines but“obliquely” through the image. The directions of both scan movements arethen essential for the bidirectional deviations, not the direction ofthe scan lines.

Determination of the Bidirectional Deviations Occurs as Follows:

-   -   Slicing of the image into (for example) 10 equally wide strips,        preferably along the slow scan axis (slice perpendicular to the        fast axis)    -   Slicing of the strips in the two partial images from the forward        scan and back scan (if necessary filling in the missing lines        with the average value of the adjacent lines)    -   Calculation of (one-dimensional) cross-correlation functions of        the two partial images along the two scan directions (the        following evaluation occurs for both scan directions in order to        be able to correct both scanners)        -   during displacement of the two partial images relative to            each other, all of the image data can actually be utilized,            i.e., missing data in the edge region of the partial images            are taken from the neighboring strips    -   Evaluation of these correlation functions:        -   position of the maximum: at this displacement length the two            partial images best fit each other, i.e., this displacement            is the desired correction of the bidirectional deviation on            the image position on which the strip is situated        -   half-width and half-height of the peak: gauge of the            accuracy of measurement. The cross correlation function is            normalized, for example, to the autocorrelation(s) of the            two partial images, i.e., a correlation of 1 means that the            two partial images agree exactly during this displacement.    -   At rotation angles that deviate less than (for example) 10° from        the main axis of the scanner, only this scanner should be        evaluated (for example, in a 0° scan only the X scanner can be        evaluated)    -   The position of the peaks of the individual image strips yield a        curve per scan direction (x, y) with, for example, 10 data        points (number of image strips) for the bidirectional deviation        in the image.    -   Depending on the accuracy of the measurement (half-width and        half-height of the cross-correlation peaks) these data points        should advantageously be marked with weighting factors or, if        unusable, discarded.

Correction of the scanner control occurs advantageously via thecoefficients of a Fourier series from the signal curves of the scannercontrol signals.

The correction of the scanner coefficient then occurs as follows:

-   -   Determination of the scanner coefficient that best corrects the        found deviation curve Correlation of the measured deviation        curve with sin(1 f), sin(2 f), sin(3 f), . . . (which        coefficient yields the maximum correlation with the measured        deviation curve), where 1 f, 2 f, 3 f . . . are the individual        frequency fractions of the scanner control    -   The phase error of the coefficient can be calculated from the        correlation value (large amplitude of the deviation curve=large        phase error of the coefficient). When the deviation is caused        only by a coefficient, a sine curve with nodal points at the        reversal points of the scanner is always present (outside of the        image).    -   Correction of the phase of the coefficient (amplitude is        advantageously not changed in order to obtain the long-term        linearity of scanner movement).    -   The phase of the concerned coefficient could also not be fully        corrected, depending on the quality of the measurement        (weighting factors, see above). The finally valid correction        then occurs, for example, during the next scan images.    -   In this way with each scan (at least) one coefficient could be        corrected. By correlation of the deviation curve with several        scanner frequencies, several coefficients can also be corrected        in one step (depending on the accuracy of measured values).

Over time a parameter field can be produced on the control computer ofthe microscope with scanner coefficients that are permanently adjusted.

The parameters are, for example: speed, zoom (for example zoom 0.7, 0.8,1, 2, 4, 8).

If an intermediate zoom is used, interpolation can occur fromneighboring coefficients and in similar fashion the neighboringcoefficients (also with weighting) can be adjusted after a deviationmeasurement.

The parameter field on the hard disk can only slowly changeadvantageously (for example, weighted average between daily average andpresent value in the files).

In addition, a further relatively rapidly variable parameter field canoccur in that a reaction occurs to temperature fluctuations during theday (according to possibility, evaluated after each image).

A correction of the active coefficient could also occur duringdeviations greater than a predetermined threshold (for example, a valueadjustable by the user).

This parameter field is also recorded and stored.

Depending on the deviation width and quality of this day-parameter oncompletion of the LSM program, the field stored on the hard disk couldbe adjusted (possible parameters for weighting: deviation width of themeasured deviations, value number, operating hours, etc.). The on-linecorrection can be switched off, i.e., the user can have the possibilityof activating or suppressing the mechanism of automatic correction ofthe scanner control. The original calibration set from the plant can bestored for evaluations of development of the mechanical and electricalbehavior of the scanner and the copy can be permanently stored. Theparameter set on the hard disk can also be reset (by means of theoriginal calibration).

A comparison of the formed parameter set with the original set couldlead, for example, to a recommendation on the screen for the user“Please calibrate the scanner again” (the threshold value could bedifferent according to scan speed).

In multichannel images (during the scan different data are recorded, forexample, for each image pixel with several detectors) all channels couldbe evaluated and compared separately (the scanner-related imagedistortion should be the same in all images).

Through the described correction, in addition to approvedbidirectionality, an improvement in linearity is also possible, sincethe coefficients can be exactly shifted with reference to their phase.

1. (canceled)
 2. The method according to claim 16, wherein in the stepof subdividing the scan field, the scan field is divided into stripsthat form the partial regions.
 3. The method according to claim 2, inwhich the strips are sliced in a direction parallel to the image edge ofthe scan field.
 4. Method according to claim 2, in which thelongitudinal axis of the strips during line-by-line scanning isperpendicular to the direction of the scan lines in the first and secondpartial images.
 5. Method according to claim 16, in which in thedetermining step, the correlation of partial images is determined foreach scan axis.
 6. Method according to claim 16, in which in thedetermining step, deviations are determined from the correlation of thepartial images.
 7. Method according to claim 6, in which in thedetermining step, the deviations are combined as data points for adeviation curve and the deviation curve is used to determine acorrection value of the scanner control.
 8. Method according to claim 7,in which in the determining step, the deviation curve is correlated withthe individual frequency fractions of the scanner control fordetermination of the correction of the scanner control and correctionvalues for the scanner control are determined via the correlationvalues.
 9. Method according to claim 1, further comprising the step ofstoring the correction values for the scanner control together with thetime the correction values are determined.
 10. Method according to claim9, further comprising the step of comparing the correction valuesrecorded at different times.
 11. Method according to claim 16, furthercomprising the step of controlling or correcting the frequency of thescanner with the determined correction values.
 12. Method according toclaim 2, in which in the step of subdividing the scan field, the slicedirection of the partial image lies parallel to an image edge of thescan field.
 13. Method according to claim 2, in which in the step ofsubdividing the scan field, the slice direction of the partial imagesagrees with a scan axis.
 14. Method according to claim 2, in which inthe step of subdividing the scan field, the slice direction of thepartial images is at an angle to at least one scan axis.
 15. Methodaccording to claim 16, in which in the step of determining a correctionvalue, a test pattern is used to determine the correction value.
 16. Amethod for scanner control in at least one scan axis in a laser scanningmicroscope, comprising the steps of: subdividing the scan field intopartial regions; generating a first partial image by a forward line scanof at least one partial region; generating a second partial image by aback line scan of the partial region; comparing the first partial imagewith the second partial image to determine a deviation between the firstand second partial images; and determining a correction value for thescanner control from the deviation between the first and second partialimages.
 17. Method according to claim 8, in which when the deviation iscaused only by a coefficient, a sine curve with nodal points at thereversal points of the line scan is always present.